Electronic-grade high-purity, high-abundance boron trifluoride 11 has strong market demand and my country’s supply capacity is weak

Boron trifluoride 11 is an important special gas material that can be used in high-density microelectronic chips, panels, high-performance semiconductor and other industries. As a p-type doping source, boron trifluoride 11 is used in various aspects such as doping, oxidation diffusion, ion implantation, plasma etching, silicon/germanium epitaxial growth, etc. In addition, boron trifluoride 11 can also be used in manufacturing Diborane, boron trichloride and other chemical materials and optical fiber prefabricated parts.

Currently, 13 isotopes of boron atoms have been discovered, of which only boron 10 and boron 11 do not have any radioactivity. They are stable isotopes and are widely found in nature. In recent years, high-purity isotope materials have been increasingly used in large-size chip manufacturing. Boron trifluoride 11 is one of the main ion implantation gases, which can improve chip stability and anti-interference capabilities. Against the background of the rapid development of my country’s chip industry , the demand for boron trifluoride 11 applications continues to increase, especially electronic-grade high-purity, high-abundance boron trifluoride 11.

Boron trifluoride 11 is a consumable material in the manufacturing process of semiconductors and chips. In the context of the eastward shift of the global semiconductor industry, domestic semiconductor companies’ demand for high-purity, high-abundance boron trifluoride 11 is growing rapidly. However, Boron fluoride 11 production has high technical barriers and low production capacity, and my country’s market demand mainly relies on imports. The unit price of imported boron trifluoride 11 is high. In the context of Sino-US trade friction, domestic production of boron trifluoride 11 is urgently needed.

According to the “2023-2028 China Boron Trifluoride 11 Industry Market In-depth Research and Development Prospects Forecast Report released by the Industrial Research Center It shows that in recent years, in order to meet the expanding market demand, Chinese companies have increased their research and development efforts on boron trifluoride 11. With in-depth research and breakthroughs in preparation technology, some companies have achieved electronic-grade high-abundance boron trifluoride 11 mass production. At present, domestic R&D institutions or production companies related to boron trifluoride 11 include Shanghai Research Institute of Chemical Industry, Tianjin University, Shandong Heyi Gas Co., Ltd., Jiangsu Zhengbonuo Technology, Shandong Zhongbor New Materials, etc.

Currently, the electronic-grade high-abundance boron 11 isotope production process developed by the Shanghai Research Institute of Chemical Industry has achieved stable mass production at Shandong Heyi Gas Co., Ltd., with product abundance reaching over 99.9%. This project uses anisole chemical exchange method to produce boron 11 isotope. It has independent intellectual property rights in process control, new fillers, reaction design, detection methods, etc., which not only fills the gap in my country’s high-abundance boron 11 isotope industry. The gap will also help improve my country’s supply capacity of semiconductor special gas materials and maintain the safety of the industrial chain.

Industry analysts said that boron trifluoride 11 is a stable isotope. As one of the special gases, boron trifluoride 11 is used in chips It is widely used in , semiconductor, panel and other industries. my country is a major producer of chips and semiconductors, and the market demand for boron trifluoride 11 is vast. However, due to technical limitations, my country’s electronic-grade high-purity, high-abundance boron trifluoride 11 supply capacity is weak. Under the Sino-US trade friction, electronics There is an urgent need for domestic replacement of high-purity, high-abundance boron trifluoride 11.